0
R2
-10
R1
C
-20
C
-30
-40
d
-50
600
800
1000
1200
1400
Frequency ( GHz)
(a)
(b)
Figure 2. (a) Split ring resonator geometry and dimensional parameters after Marqués [14], (b) frequency response of
SRR with center at 1 THz.
To achieve 1 THz operation , the SRR was dimensioned with parameters summarized in Table 1.
Table 1. Simulation parameters for geometry in figure 2a, with inner radius (IR), outer radius (OR), and metal thickness
( z ).
IR
OR
z
micron
micron
micron
60
90
20
Inner ring
110
140
20
Outer ring
30
micron
C
20
micron
d
In this design, the structure is fabricated on a two-metal substrate, with metal 1 supplying input and ground
connections, and metal 2 providing ring material, as depicted in figure 3. Choice of fabrication substrates include printed
circuit board and semiconductor substrate. While a PCB substrate offers a robust option, smaller geometries and critical
dimensions may be reproduced with tighter tolerances on a wafer substrate. The objective is to print the array with
precision in ring dimensions to achieve the desired resonant frequency and Q, and precision in metal 1 traces so that
array resonates in unison. Ultimately, the choice of substrate is determined by customer specifications; lower
frequencies with wavelengths in the millimeters may be obtained on PCB.